JPH0188454U - - Google Patents
Info
- Publication number
- JPH0188454U JPH0188454U JP18299687U JP18299687U JPH0188454U JP H0188454 U JPH0188454 U JP H0188454U JP 18299687 U JP18299687 U JP 18299687U JP 18299687 U JP18299687 U JP 18299687U JP H0188454 U JPH0188454 U JP H0188454U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- field lens
- turning
- controlling
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18299687U JPH0188454U (en]) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18299687U JPH0188454U (en]) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188454U true JPH0188454U (en]) | 1989-06-12 |
Family
ID=31474432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18299687U Pending JPH0188454U (en]) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188454U (en]) |
-
1987
- 1987-12-02 JP JP18299687U patent/JPH0188454U/ja active Pending